Dielectric charging effects in floating electrode MEMS capacitive switches
نویسندگان
چکیده
منابع مشابه
Compact Model of Dielectric Charging in RF MEMS Capacitive Switches
RF MEMS capacitive switches show great potential for use in wireless communication device. However, their widespread insertion in commercial products requires further improvements in their longterm reliability. Dielectric charging is one of the factors that impact switch reliability. Dielectric charging is understood to mean the accumulation of electric charge in the insulating dielectric layer...
متن کاملA Mim Capacitor Study of Dielectric Charging for Rf Mems Capacitive Switches
MIM capacitors are considered equally important devices for the assessment of dielectric charging in RF MEMS capacitive switches. Beside the obvious similarities between the down state condition of RF MEMS and MIM capacitors there are also some important differences. The paper aims to introduce a novel approach to the study of dielectric charging in MEMS with the aid of MIM capacitors by combin...
متن کاملFloating Electrode Microelectromechanical System Capacitive Switches: A Different Actuation Mechanism
The paper investigates the actuation mechanism in floating electrode MEMS capacitive switches. It demonstrated that in the pull-in state the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and FowlerNordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt dec...
متن کاملUnderstanding and Improving Longevity in RF MEMS Capacitive Switches
This paper discusses issues relating to the reliability and methods for employing high-cycle life testing in capacitive RF MEMS switches. In order to investigate dielectric charging, transient current spectroscopy is used to characterize and model the ingress and egress of charges within the switch insulating layer providing an efficient, powerful tool to investigate various insulating material...
متن کاملA Model to Predict Temperature Acceleration of Dielectric-charging Effects in Rf Mems Capacitive Switches (preprint)
Temperature acceleration of dielectriccharging effects in state-of-the-art RF MEMS capacitive switches was characterized and modeled. From the measured charging and discharging transient currents across the switching dielectric, densities and time constants of traps in the dielectric were extracted under different temperatures. It was found that, while charging and discharging time constants ar...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Microelectronics Reliability
دوره 55 شماره
صفحات -
تاریخ انتشار 2015